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Vacuum Pump Fluids
TMC Line Card
Vacuum Pump Fluids
TMC Line Card
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Vacuum Pump Fluids
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Krytox Vacuum Pump Fluid |
A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete nonflammability, oxygen compatibility and resistance to aggressive chemicals are requirements. Low vapor pressures and reclaimability make this an excellent choice for plasma, cvd and other operations of semiconductor, disk drive and other high technologies. Available in grades for rotary vane pumps and diffusion pumps. The grades for rotary vane pumps are 1506, 1514 and 1525.
*Krytox™ is made by DuPont® |
Halovac Vacuum Pump Fluid |
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A synthetic chlorotrifluoroethylene vacuum pump oil which can be used in rotary piston and rotary vane pumps. Because of its higher viscosity it should go into larger pumps. This fluid has low vapor pressure and excellent chemical resistance and can be reclaimed many times. Grades are H-190, having the higher viscosity for rotary piston pumps, and H-100, a lower viscosity for rotary vane pumps.
*HaloVac™ is made by Halocarbon Corporation
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TW-7 Mechanical / Vacuum Pump Oil
A technical white clear hydrocarbon mechanical / vacuum pump oil that has excellent resistance to the processes of plasma etching, CVD and other aggressive processes. It doesn't have the resistance of the synthetic perfluorocarbons but can be safely used in many applications needing a more stable and resistant oil. Not recommended for oxygen and highly reactive gas loads. |
CONVOIL-20 Mechanical / Vacuum Pump Oil
A highly purified doubly distilled mechanical /vacuum pump oil and diffusion pump oil. Because of the high purity it has high stability for many of the aggressive applications in semiconductor processing. It is an excellent diffusion pump fluid. It is not recommended for oxygen and highly reactive gas loads. The price and quality make this a choice for many applications.
· Double Vacuum distillation
· Excellent lubricating qualities
· Reduced backstreaming
· Excellent vapor pressure characteristics
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PLASMA OIL-80 |
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| Plasma Oil 80 is a hydrocarbon fluid developed especially for mechanical pump use. It has been carefully distilled to remove interfering high reactive components that shorten fluid life. Ordinary mechanical pump fluids are composed of broad mixtures of components which can react with process gases to form sludge. Through high vacuum distillation, Plasma 0il-80 is purified to optimize characteristics such as very low vapor pressure, durability, resistance to sludge formation and lubricity. Recommended for wafer processing, ion implantation, vacuum distillation, mass spectrometers, some plasma etch and LPCVD applications. | |
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70/19 Mechanical / Vacuum Pump Oil
70/19 mechanical pump fluid is a distilled hydrocarbon fluid formulated for
durability, low vapor pressure and excellent lubricating qualities. This fluid is
designed for use in all types of mechanical vacuum pumps and is classified as a
general purpose mechanical pump fluid. Distillation separation procedure which
removes light end fractions, resulting in a lower vapor pressure, reduced
backstreaming and product purity. 70/19 Mechanical pump fluid is recommended
for use in non-corrosive applications.
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