A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete nonflammability, oxygen compatibility and resistance to aggressive chemicals are requirements. Low vapor pressures and reclaimability make this an excellent choice for plasma, cvd and other operations of semiconductor, disk drive and other high technologies. Available in grades for rotary vane pumps and diffusion pumps. The grades for rotary vane pumps are 1506, 1514 and 1525. *Krytox® is made by DuPont™ |  |
Krytox® performance lubricants are the products of choice for applications where complete nonflammability, oxygen compatibility, and resistance to aggressive chemicals are requirements. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in: - Vacuum pumps where safety is critical
- Hostile environments where semiconductor process chemicals can attack most other lubricants
- Vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable
Vacuum Pump Fluids Krytox® vacuum pump fluids are used in applications where conventional vacuum pump oils cause safety, waste disposal, and maintenance problems. They are nonflammable and eliminate the chance of fire in pumps. They are nonreactive and safe in oxygen systems, providing a high degree of safety. 
They are compatible and miscible with other competitive PFPE fluids as well as other non-PFPE types of vacuum fluids. Krytox® vacuum fluids do not contain acetal groups, which are susceptible to attack by Lewis acids. This gives Krytox® superior stability as a vacuum pump fluid to other PFPE fluids. Krytox® vacuum fluids are precisely distilled to provide low vapor pressures and give superior performance. Krytox® vacuum pump fluids meet or exceed the warranty requirements of all major pump manufacturers. Vacuum Greases Made with low vapor pressure Krytox® oils, and Krytox® greases are an excellent choice for lubricants or sealants used in all vacuum environments, especially when access for repair or replacement is difficult or impossible. Applications include use as a sealant for glassware connections, thread lubricant, bearings, O-rings, and conveyor chain lubricant, as well as an excellent sealant and lubricant for stopcocks and flanges. Low vapor pressure greases offer:
- Less than 1x10-13 torr. vapor pressure at 20°C (68°F)
- Less than 1x10-5 torr. vapor pressure at 200°C (392°F)
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Krytox